CAS Registry Number®
999-97-3
CAS Name
Hexamethyldisilazane
Molecular Formula
C6H19NSi2
Molecular Mass
161.39
Compound Properties
-
Boiling Point (1)
125 °C
-
Density (1)
0.7741 g/cm³ @ Temp: 25 °C
Source(s)
- (1) Hazardous Substances Data Bank data were obtained from the National Library of Medicine (US)
Other Names and Identifiers
InChI
InChI=1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3
InChIKey
InChIKey=FFUAGWLWBBFQJT-UHFFFAOYSA-N
SMILES
N([Si](C)(C)C)[Si](C)(C)C
Canonical SMILES
N([Si](C)(C)C)[Si](C)(C)C
Other Names for this Substance
- Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-
- Disilazane, 1,1,1,3,3,3-hexamethyl-
- 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine
- 1,1,1,3,3,3-Hexamethyldisilazane
- Bis(trimethylsilyl)amine
- Hexamethyldisilazane
- OAP
- Di(trimethylsilyl)amine
- SZ 6079
- HMDS
- Hexamethyldisilylamine
- HMDS (silazane)
- TSL 8802
- LS 7150
- HMDS 3
- TSR 8802
- SE 31
- SE 31 (silazane)
Deleted or Replaced CAS Registry Numbers
18186-75-9, 103737-28-6, 116638-29-0, 127290-38-4, 761458-30-4
